PNG
IHDR P pHYs &? tEXtXML:com.adobe.xmp © Siemens AG 2010, Alle Rechte vorbehalten 8 8 8 1Y IDATxydgz{9Uwd,ƣ{&hy$#`r$Œ $' eȂaX$q)l-A"GF}f3&$d{ު:|KxpF!9sಛRuTs}GJ)L0a &LA_0a &L0Ձ8N0a &LxQ &L0a8N0a &LxQ &L0a8N0a &LxQ &L0a8N0a &LxQ &L0abKy;XPU.=yfm6[[<}F{{;:N8G'1ҵ->vw^y̻n> z
4ގüsk !J)t3yo;ϩ'W̻3ǎm[N8A4|#8q2\pќڶXӨ|$˪ J)B;_ZJ\v9͈ЧslN? [r*?8!TQEKD TښS&LEs)&'/]bu&/{4Bof{k~̺qxxH΅iHrdXV@)%bF${!)D23yn6r_plSJqǝ\|L)?!~ykÌ;{y7w{xaE)n?Kfk>{.ș!FΜ:ɓ'?Y7cpbΞ''̩S%k[I)C l6g>ڼDW}c5qia@''oy{<@1⼳LUQȹ0#!xRu,W+08y$.\`>2c) 0:ow'G3drʄH)ޑS1E=g33_iD2/uvz8\,sӧ9~=8V~oF ^zys&B=rtmG1lr/xޯ1#|;/EUu3{;u>{]<z'8G#ys]#N8%ϵox^pU|I9G;_oKx?:A;TUQUrrAw8<<>s|6goo#sn8 RR_o
BhJ)>y](G˽rI| T
!Kaz_9T1F*ku}ms=0ڞBrm|cۜ]ۢNIƑ~w~'}>._ߙKm1f*Ua>q/yoƗmQ_5a«8U.](pk'rJo+%9J=@[7J)')嗀~L0a $LqW$D+>pnƔp"lo')or#]|m7~7&L0a+ӎㄯ(sNA4
R6TIR_~U{X/1a &|`R'|@Dhx3MӐo)L h{/`